This paper addresses the problem of model quality of reference models and aims to identify consolidated evaluation criteria. The central research question is: "Which consolidated criteria can be identified for an evaluation of the model quality of reference models?" In order to achieve this goal, a systematic literature analysis based on the methods of vom Brocke et al. (2009) and Webster & Watson (2002) was chosen as the methodological approach. The main results of this work include the identification of consolidated evaluation criteria for reference models. These criteria are AUC (Accuracy, Unambiguity and Completeness), relevance, economic efficiency, clarity, comparability, systematic or modular structure, adaptability and general validity. The paper explains in detail how these criteria were derived from the literature and which publications were available as a basis for their determination.